Flexible membrane for carrier head
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United States of America Patent
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-
May 31, 2011
Grant Date -
Sep 23, 2010
app pub date -
Jun 1, 2010
filing date -
Nov 22, 2006
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A carrier head that has a base assembly, a retaining ring assembly, a carrier ring, and a flexible membrane is described. The flexible membrane has a main portion and an outer annular portion, wherein a junction between the main portion and the outer annular portion comprises a peripheral edge hinge and an annular recess above the hinge along the outer wall of the outer annular portion.
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