Microwave plasma reactor for manufacturing synthetic diamond material

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11371147
APP PUB NO 20150030786A1
SERIAL NO

13994903

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A microwave plasma reactor for manufacturing synthetic diamond material via chemical vapour deposition, the microwave plasma reactor includes a plasma chamber, a substrate holder, a microwave coupling configuration for feeding microwaves into the plasma chamber, and a gas flow system for feeding process gases into the plasma chamber and removing them therefrom. The gas flow system includes a gas inlet array having a plurality of gas inlets for directing the process gases towards the substrate holder. The gas inlet array includes at least six gas inlets disposed in a substantially parallel or divergent orientation relative to a central axis of the plasma chamber.

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Patent Owner(s)

  • ELEMENT SIX TECHNOLOGIES LIMITED

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Brandon, John Robert Ascot, GB 29 444
Coe, Steven Edward Ascot, GB 6 36
Scarsbrook, Geoffrey Alan Ascot, GB 70 976
Twitchen, Daniel James Ascot, GB 70 1337
Wilman, Jonathan James Ascot, GB 8 47
Wort, Christopher John Howard Ascot, GB 43 227

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