Bulk acoustic wave filter having release hole and fabricating method of the same
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United States of America Patent
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-
Sep 12, 2023
Grant Date -
Dec 8, 2022
app pub date -
Aug 4, 2022
filing date -
Jun 21, 2022
priority date (Note) -
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status (Latency Note)
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Abstract
A bulk acoustic wave resonator includes a substrate, a support layer disposed on the substrate, the support layer including a cavity having a polygon shape with more than three sides in a plane crossing a first direction from the substrate to the support layer, a piezoelectric layer disposed on the support layer, a bottom electrode disposed below the piezoelectric layer, partially overlapping the cavity, and extending across a first side of the cavity, and a top electrode disposed above the piezoelectric layer, partially overlapping the cavity, and extending across a second side of the cavity. The bulk acoustic wave resonator further includes at least one release hole formed in the piezoelectric layer and overlapping a portion of the cavity.
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