Pumping system for evacuating reactor chambers
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United States of America Patent
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-
Jul 18, 1995
Issued Date -
N/A
app pub date -
Sep 6, 1994
filing date -
Dec 18, 1992
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A system for evacuating a reactor chamber includes a main evacuation line connected at one end thereof to the reactor chamber and at another end thereof to a means for creating a partial vacuum. A valve in the main evacuation line divides the line into a chamber side and a vacuum side. A second line is connected at one end to the vacuum side of the main evacuation line and at another end to a fluid supply source. As the valve in the main evacuation line is opened, fluid is supplied through the second line to the main evacuation line to prevent rapid, turbulence-inducing pressure drops in the reactor chamber.
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