Composite structure and semiconductor manufacturing apparatus including composite structure

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11802085
APP PUB NO 20210340066A1
SERIAL NO

17244247

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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Disclosed is to provide a composite structure used as a member for a semiconductor manufacturing apparatus with which low-particle generation can be improved, as well as a semiconductor manufacturing apparatus including the same. A composite structure including a base material and a structure that is provided on the base material and has a surface, in which the structure comprises Y3Al5O12 as a main component, and has an indentation hardness being larger than 8.5 GPa features excellent low-particle generation and is suitably used as a member for a semiconductor apparatus.

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Patent Owner(s)

  • TOTO LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Ashizawa, Hiroaki Kitakyushu, JP 29 255
Takizawa, Ryoto Kitakyushu, JP 6 1

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