Contactless wafer separator

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11664257
SERIAL NO

17480161

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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The present disclosure is directed to a wafer container including: a housing configured for transporting a plurality of wafers, wherein the plurality of wafers are stacked on a base of the housing in a first direction; a plurality of wafer separator rings; each of the wafer separator rings configured to encircle a wafer of the plurality of wafers in a second direction that is substantially perpendicular to the first direction, each of the wafer separator rings including a top surface and a bottom surface, defining a thickness there between extending in the first direction, which is about 0.3 mm-1.4 mm; and each of the wafer separator rings including an inner side wall and an outer side wall defined by an inner diameter and an outer diameter, respectively, in the second direction, wherein the inner diameter of the wafer separator ring is greater than 300 mm and configured to be spaced apart from the wafer it is encircling.

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Patent Owner(s)

  • INTEL CORP.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Biggs, John Queen Creek, US 1 0
Dhruvkumar, Varshalaxmi Bhatt Kedah, MY 1 0
Wong, Shaw Fong Pulau Pinang, MY 5 58

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