Apparatus and method for testing of microscale to nanoscale thin films
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United States of America Patent
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Nov 16, 2004
Grant Date -
Mar 27, 2003
app pub date -
Sep 11, 2002
filing date -
Sep 12, 2001
priority date (Note) -
Expired
status (Latency Note)
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Abstract
Apparatus and method for testing a thin film material. A chip is fabricated that includes the specimen to be tested, held by a force sensor beam at a first longitudinal end and by a support structure at a second longitudinal end. The chip is configured to be placed into a testing environment for quantitative and qualitative material property testing of the specimen. Methods are also provided for fabricating a testing chip.
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