Top via cut fill process for line extension reduction

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United States of America Patent

PATENT NO 11804406
SERIAL NO

17383637

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An interconnect structure including a top via with a minimum line end extension comprises a cut filled with an etch stop material. The interconnect structure further comprises a line formed adjacent to the etch stop material. The interconnect structure further comprises a top via formed on the line adjacent to the etch stop material, wherein the top via utilizes the etch stop material to achieve minimum line extension.

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Patent Owner(s)

  • INTERNATIONAL BUSINESS MACHINE CORPORATION

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Anderson, Brent Jericho, US 92 1148
Choi, Kisik Watervliet, US 160 1926
Clevenger, Lawrence A Saratoga Springs, US 726 4516
Lanzillo, Nicholas Anthony Wynantskill, US 134 30
Penny, Christopher J Saratoga Springs, US 176 1547
Robison, Robert Rexford, US 62 72

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