Wafer carrier, wafer access device and wafer carrier and access assembly having the same

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11817342
APP PUB NO 20230128509A1
SERIAL NO

17972946

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Abstract

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A wafer access assembly, a wafer access device and a wafer carrier are provided. The wafer access device includes a base, a shaft, a plurality of couple plates, a plurality of arms, and a stretchable component. The base includes a groove. The shaft extends into the groove and is capable of sliding into the groove. The plurality of couple plates mounting on the shaft. Each of the plurality of couple plates includes a plate body and a through hole on the plate body for the shaft passing through. Each of the plurality of arms is extended from an end of each of the plurality of couple plates. The stretchable component includes a plurality of connecting side walls connecting adjacent couple plates together. The plurality of stretchable component are capable of changing a distance between adjacent couple plates.

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Patent Owner(s)

  • DLY TECHNOLOGIES INC.

International Classification(s)

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Pan, Shih Feng Donggang Township, Pingtung County, TW 5 1

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