Inspection method and inspection device
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United States of America Patent
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-
Feb 6, 2001
Grant Date -
N/A
app pub date -
Mar 30, 1999
filing date -
Mar 30, 1998
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
An method and device for inspecting for surface defects, internal defects, and surface-adhered foreign matter on semitransparent materials. An illuminating device transmits light, that is then collimated through a collimating lens unit, through an object to be inspected. The light then transmits through the object to be inspected an eventually is detected by a detector. Any defects in the object to be inspected will be detected.
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Cited Art Landscape
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