Diffraction element and method of manufacturing diffraction element
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United States of America Patent
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Oct 11, 2016
Grant Date -
Feb 13, 2014
app pub date -
Jul 30, 2013
filing date -
Aug 13, 2012
priority date (Note) -
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Abstract
Provided is an immersion diffraction element that prevents decrease of diffraction efficiency thereof so as to satisfy optical performance. A reflection type diffraction element is made of a material transmitting a light, beam having a predetermined wavelength. An echelle diffraction grating covered with a reflecting film that prevents transmission of the light beam is formed on one surface of the material. A diffraction grating is formed off in a repeated manner, a blazed surface facing incident light and a non-blazed surface connecting the blazed surface to a neighboring blazed surface. An angle formed between the blazed surface and the non-blazed surface is an acute angle. A defect generated at a grating vertex of the blazed surface fails in a shadow of the neighboring blazed surface so as to prevent the incident light from becoming scattered light due to the defect portion.
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