Energy filter and charged particle beam system

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 10546714
APP PUB NO 20180301314A1
SERIAL NO

15890585

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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There is provided an energy filter capable of being simplified in structure and of achieving low aberrations. The energy filter (100) includes a first sector magnet (10) and a second sector magnet (20). The first and second magnets (10, 20) are configured mirror-symmetrically with respect to a symmetry plane (M). There are one focal point of crossover in the X direction and one focal point of crossover in the Y direction. The focal point of crossover in the X direction and the focal point of crossover in the Y direction are at an energy dispersive plane (S2). There are two focal points of image in the X direction and two focal points of image in the Y direction. The focal points of image in the X direction and the focal points of image in the Y direction are at the symmetry plane (M) and at an achromatic plane (A2).

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Patent Owner(s)

  • JEOL LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Omoto, Kazuya Tokyo, JP 5 7

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