Online trimming device and method for micro-shell resonator gyroscope

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United States of America Patent

PATENT NO 11703356
SERIAL NO

18097298

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Abstract

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An online trimming device and method for a micro-shell resonator gyroscope is provided. A micro-shell resonator gyroscope fixing fixture and a mode test circuit in the device are placed in a vacuum test cavity provided with a circuit interface. The mode test circuit and a host computer are connected through a circuit interface on the vacuum test cavity. The gyroscope fixing fixture is provided with a signal interface, and the electrodes on the gyroscope substrate are connected to the signal interface. The signal interface on the fixture is connected to the mode test circuit. The laser etching module is located at the top of the device. An opening is formed in the gyroscope fixing fixture. The vacuum test cavity is provided with a transparent trimming window. The laser acts on the edge of the resonant structure of the gyroscope through the trimming window and the through hole of the fixture.

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Patent Owner(s)

  • NATIONAL UNIVERSITY OF DEFENSE TECHNOLOGY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Lu, Kun Changsha, CN 81 215
Shi, Yan Changsha, CN 99 746
Wu, Xuezhong Changsha, CN 9 56
Xi, Xiang Changsha, CN 3 1
Xiao, Dingbang Changsha, CN 3 1
Zhang, Yongmeng Changsha, CN 2 0

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