Hall effect sensor

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United States of America Patent

PATENT NO 6734514
SERIAL NO

10374656

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Abstract

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A metrological Hall effect sensor with sensitivity to temperature less than 250 ppm/.degree. C. and with high Hall effect coefficient for temperatures greater than 200.degree. C. formed in a multilayer structure comprising a thin active layer deposited on a substrate, wherein the substrate is made of monocrystalline silicon carbide (SiC), and wherein the thin active layer is made of a weakly type n-doped silicon carbide (SiC) semiconductor in the exhaustion regime.

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Patent Owner(s)

  • CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Camassel, Jean Saint-Clement-De-Riviere, FR 1 8
Contreras, Sylvie Chemin Vieux, FR 2 14
Pernot, Julien Montpellier, FR 8 11
Robert, Jean-Louis Le Cres, FR 4 76

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