Substrate temperature regulating support pins
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United States of America Patent
Stats
-
Dec 9, 2008
Grant Date -
Feb 22, 2007
app pub date -
Aug 18, 2005
filing date -
Aug 18, 2005
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A method and apparatus for regulating the temperature of substrates positioned within a chamber are provided. In one embodiment, a substrate support pin is provided that includes a body having a substrate support region defined at a first end and a mounting region defined at a second end of the body. A mounting feature is formed at the mounting region and is adapted to couple the body to a vacuum chamber body. A passage extends from the mounting region to the support region. An outlet formed through the body and orientated at an angle greater than zero relative to a centerline of the body is p provided to deliver fluids flowing through the passage out the first end of the body. In another embodiment, a chamber includes a pin configured to provide a temperature controlled fluid to an underside of a substrate supported on the pin.
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