Simultaneous phase shifting module for use in interferometry
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United States of America Patent
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Jan 27, 2009
Grant Date -
Jul 6, 2006
app pub date -
Nov 26, 2003
filing date -
Nov 27, 2002
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Abstract
A back-end assembly for use with a front-end assembly in acquiring phase-shifted interferograms having a plurality of imaging modules (Ma, Mb, Mc). Each module (Ma, Mb, Mc) has a quarter wave plate (30a, 30b, 30c), a polarizer (32a, 32b, 32c), and an image sensor (34a, 34b, 34c) so that each polarizer has a different rotation orientation thus acquiring phase-shifted interferograms.
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