Method for forming nanoscale features

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 7560658
APP PUB NO 20060237405A1
SERIAL NO

11167463

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Abstract

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Here is presented a versatile technique for machining of nanometer-scale features using tightly-focused ultrashort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials. The features may be extremely small (<20 nm) and are highly reproducible.

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Patent Owner(s)

  • THE REGENTS OF THE UNIVERSITY OF MICHIGAN

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hunt, Alan J Plymouth , US 6 71
Joglekar, Ajit P Ann Arbor , US 5 40
Meyhofer, Edgar Ann Arbor , US 8 69
Mourou, Gerald Ann Arbor , US 1 1
Nees, John A Ann Arbor , US 7 173
Spooner, Greg Kensington , US 23 786

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