Projection optical system and exposure apparatus having the same
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United States of America Patent
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Jul 22, 2008
Grant Date -
Jun 15, 2006
app pub date -
Nov 17, 2005
filing date -
Nov 18, 2004
priority date (Note) -
Expired
status (Latency Note)
Importance
Abstract
A projection optical system used for an exposure apparatus to projecting a reduced size of an image of an object onto an image plane includes plural refractive elements that dispense with a reflective element having a substantial optical power, wherein the projection optical system forms an intermediate image.
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