Multi-environment polarized infrared reflectometer for semiconductor metrology

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United States of America

PATENT NO 11231362
SERIAL NO

16723565

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Abstract

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A system includes a light source, a Fourier transform infrared reflectometer (FTIR) spectrometer, and broadband reflectometer optics. The system is configured to measure polarized light and unpolarized reflectivities in a wavelength range from 2 μm to 20 μm. The light source can be a laser-driven light source. The spectroscopic reflectometer can include a single channel or two channels.

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Patent Owner(s)

  • KLA CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Hu, Dawei Shanghai, CN 26 46
Krishnan, Shankar Santa Clara, US 151 981
Liu, Xuefeng San Jose, US 142 1423
Wang, David Y Santa Clara, US 51 853
Ye, Mengmeng Shanghai, CN 5 13
Zhuang, Guorong V San Jose, US 17 231

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