Cantilevered beam NEMS switch

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United States of America Patent

PATENT NO 8563885
APP PUB NO 20110168530A1
SERIAL NO

12943575

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Abstract

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Nanoelectromechanical devices use a cantilevered beam supported by a base. The cantilevered beam is constructed with a nanoscale gap (e.g., less than 10 nm) separating the cantilevered beam from an electrical structure. A low voltage (e.g., less than 2 volts) applied to the cantilevered beam can cause the beam to bend and make contact with the electrical structure. High switching speeds (e.g., less than 10 ns) can be provided. The electrical structure can be a second cantilevered beam or another structure.

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Patent Owner(s)

  • UNIVERSITY OF UTAH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Tabib-Azar, Massood Salt Lake City, US 16 54

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