Method for manufacturing semiconductor device
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United States of America Patent
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Apr 14, 2009
Grant Date -
Jun 1, 2006
app pub date -
Nov 22, 2005
filing date -
Nov 30, 2004
priority date (Note) -
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Abstract
It is an object of the present invention to provide a method for manufacturing a semiconductor device in which a contact hole with an opening having a high aspect ratio can be favorably filled without using a conventional CMP process. It is another object of the present invention to provide a method for forming a wiring with fewer steps than a conventional method and to provide a method for manufacturing a highly integrated semiconductor device with a high yield. According to the present invention, a film having a water repellent surface is formed over a surface of an insulating film having plural air holes, a region having a hydrophilic surface is formed by irradiating with light a part of the film having the water repellent surface, and a conductive film is formed by discharging and baking a liquid material having a conductive particle over the region having the hydrophilic surface.
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