Semiconductor device and method for manufacturing semiconductor device with low-permittivity layers

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 10879165
APP PUB NO 20180277479A1
SERIAL NO

15762172

Stats

ATTORNEY / AGENT: (SPONSORED)

Importance

Loading Importance Indicators... loading....

Abstract

See full text

A semiconductor device in which the generation of a distortion of a signal is suppressed, and a method for manufacturing the semiconductor device are disclosed. The semiconductor device includes a transistor region in which a field effect transistor is provided; and an interconnection region in which a metal layer electrically connected to the field effect transistor is provided. The interconnection region includes an insulating layer provided between the metal layer and a substrate, and a low-permittivity layer provided in the insulating layer below the metal layer and having a lower permittivity than the insulating layer.

Loading the Abstract Image... loading....

First Claim

See full text

Family

Loading Family data... loading....

Patent Owner(s)

  • SONY CORPORATION

International Classification(s)

  • [Classification Symbol]
  • [Patents Count]

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Saka, Naoki Kanagawa, JP 18 95

Cited Art Landscape

Load Citation

Patent Citation Ranking

Forward Cite Landscape

Load Citation

Maintenance Fees

Fee Large entity fee small entity fee micro entity fee due date
3.5 Year Payment $1600.00 $800.00 $400.00 Jun 29, 2024
7.5 Year Payment $3600.00 $1800.00 $900.00 Jun 29, 2028
11.5 Year Payment $7400.00 $3700.00 $1850.00 Jun 29, 2032
Fee Large entity fee small entity fee micro entity fee
Surcharge - 3.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 7.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge - 11.5 year - Late payment within 6 months $160.00 $80.00 $40.00
Surcharge after expiration - Late payment is unavoidable $700.00 $350.00 $175.00
Surcharge after expiration - Late payment is unintentional $1,640.00 $820.00 $410.00