Heat treatment apparatus, heat treatment method, and program
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United States of America Patent
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Jan 22, 2019
Grant Date -
Jun 1, 2017
app pub date -
Nov 18, 2016
filing date -
Nov 26, 2015
priority date (Note) -
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Abstract
A heat treatment system includes a heating unit that heats an inside of a processing chamber that accommodates a plurality of workpieces; a pressure adjusting unit that adjusts a pressure in the processing chamber; a heat treatment condition storing unit that stores a heat treatment condition according to a heat treatment content; a heat treatment change model storing unit that stores a heat treatment change model that represents a relationship between a change of the temperature and the pressure in the processing chamber and a change of a heat treatment result; a heat treatment performing unit that performs a heat treatment according to the heat treatment condition stored in the heat treatment condition storing unit; and a calculating unit that calculates a temperature and a pressure from which a target heat treatment result is derived.
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