Plasma generating arrangement

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11189463
APP PUB NO 20190333740A1
SERIAL NO

16284649

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Abstract

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A plasma generating arrangement includes a plurality of plasma sources, each plasma source including a respective antenna coil assembly electrically coupled to a common electrical terminal via a respective transmission line. Each transmission line is configured to communicate a radio frequency electrical power signal from the common electrical terminal to the respective antenna coil assembly, and has a length which is an odd multiple of ¼ of the wavelength of the radio frequency electrical power signal.

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Patent Owner(s)

  • SPTS TECHNOLOGIES LIMITED

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bennett, Paul Bristol, GB 53 477

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