Method of aligning a charged particle beam apparatus

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United States of America

PATENT NO 11901155
SERIAL NO

17392752

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Abstract

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The disclosure relates to a method of aligning a charged particle beam apparatus, comprising the steps of providing a charged particle beam apparatus in a first alignment state; using an alignment algorithm, by a processing unit, for effecting an alignment transition from said first alignment state towards a second alignment state of said charged particle beam apparatus; and providing data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.

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Patent Owner(s)

  • FEI COMPANY

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Kaplenko, Mykola Brno, CZ 3 5
Kaplenko, Oleksii Brno, CZ 4 6
Machek, Ondrej Brno, CZ 9 12
Schoenmakers, Remco Eindhoven, NL 22 72

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