Systems and methods for substrate support temperature control

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11981998
APP PUB NO 20210130960A1
SERIAL NO

17085255

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Abstract

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Exemplary temperature modulation methods may include delivering a gas through a purge line extending within a substrate support. The gas may be directed to a backside surface of the substrate support opposite a substrate support surface. The purge line may extend along a central axis of a shaft, the shaft being hermetically sealed with the substrate support. The substrate support may be characterized by a center and a circumferential edge. A first end of the purge line may be fixed at a first distance from the backside surface of the substrate support. The methods may include flowing the gas at a first flow rate via a flow pathway to remove heat from the substrate support to achieve a desired substrate support temperature profile.

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Patent Owner(s)

  • APPLIED MATERIALS INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Cheng, Rui San Jose, US 82 491
Huang, Zubin Santa Clara, US 35 32
Li, Jian Fremont, US 934 3500

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