Thin film saw device

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11936362
APP PUB NO 20210320642A1
SERIAL NO

17294630

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Abstract

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A thin film SAW device comprises a carrier substrate (CA), a TCF compensating layer (CL), a piezoelectric layer (PL), and an IDT electrode (EL) on top of the piezoelectric layer. A functional layer (FL) is arranged between piezoelectric layer and TCF compensating layer to further reduce the TCF. The material properties of the functional layer match those of the piezoelectric layer in view of acoustic velocity, density and stiffness such that they do not deviate from each other by more than 10% without having piezoelectric effect. The functional layer my be of the same crystalline constitution as the useful piezoelectric layer but without piezoelectric properties.

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Patent Owner(s)

  • RF360 SINGAPORE PTE. LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Bleyl, Ingo Munich, DE 10 79
Hauser, Markus Munich, DE 18 174
Knapp, Matthias Munich, DE 13 5

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