Apparatus using charged particle beams

Number of patents in Portfolio can not be more than 2000

United States of America

PATENT NO 11961697
APP PUB NO 20230411110A1
SERIAL NO

18144131

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Abstract

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A multi-beam apparatus for multi-beam inspection with an improved source conversion unit providing more beamlets with high electric safety, mechanical availability and mechanical stabilization has been disclosed. The source-conversion unit comprises an image-forming element array having a plurality of image-forming elements, an aberration compensator array having a plurality of micro-compensators, and a pre-bending element array with a plurality of pre-bending micro-deflectors. In each of the arrays, adjacent elements are placed in different layers, and one element may comprise two or more sub-elements placed in different layers. The sub-elements of a micro-compensator may have different functions such as micro-lens and micro-stigmators.

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Patent Owner(s)

  • ASML NETHERLANDS B.V.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Zhong-Wei San Jose, US 52 719
Hu, Xuerang San Jose, US 55 215
Liu, Xuedong San Jose, US 116 694
Ren, Weiming San Jose, US 110 636

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