Semiconductor manufacturing apparatus including a beam shaper for shaping a laser beam

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United States of America Patent

PATENT NO 11462410
APP PUB NO 20210082704A1
SERIAL NO

16845959

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A semiconductor manufacturing apparatus is provided including a beam shaper arranged on a light path of a laser beam and including a plurality of mask modules. The plurality of mask modules defines a light blocking region and a light transmitting region. At least one mask module of the plurality of mask modules includes a blocking plate configured to block a portion of the laser beam, and a driver is configured to move the blocking plate.

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Patent Owner(s)

  • SAMSUNG ELECTRONICS CO. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Han, Ilyoung Uiwang-si, KR 12 31
Kwak, Nohsung Suwon-si, KR 5 3
Lee, Guesuk Seoul, KR 2 0
Lee, Jaehee Daegu, KR 13 538
Seo, Euijin Incheon, KR 1 0
Seo, Jonghwi Suwon-si, KR 3 0

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