Bulk process gas purification systems and related methods

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United States of America Patent

PATENT NO 11826696
SERIAL NO

17340987

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Abstract

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Described are bulk process gas purification systems and related methods, including systems that are adapted to use a volume of gas at an exterior surface of a vessel, e.g., a flow of the gas, to control a temperature of the vessel interior during a recharging step, during a cooling step that follows a recharging step, or both.

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Patent Owner(s)

Patent OwnerAddress
ENTEGRIS INC129 CONCORD ROAD BILLERICA MA 01821

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Murphy, Daimhin Paul San Diego, US 7 24
Schlotterbeck, Matthew Atascadero, US 4 1

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