Imaging device capturing images of a sample including a plurality of sections

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11417499
APP PUB NO 20210351000A1
SERIAL NO

17278094

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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An object of the invention is to accurately correct a deviation in position or angle between observation regions in an imaging device that acquires images of a plurality of sample sections. The imaging device according to the invention identifies a correspondence relationship between the observation regions between the sample sections using a feature point on a first image, corrects a deviation between the sample sections using a second image in a narrower range than the first image, and after reflecting a correction result, acquires a third image having a higher resolution than the second image (see FIG. 6B).

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Patent Owner(s)

  • HITACHI HIGH-TECH CORPORATION

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chiba, Hiroyuki Tokyo, JP 85 978
Yano, Maasa Tokyo, JP 1 0

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