Wetting processing apparatus and operation method thereof

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United States of America Patent

PATENT NO 11810797
SERIAL NO

16722438

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Importance

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Abstract

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A wet processing apparatus and an operation method thereof are provided. The wet processing apparatus includes: a tank body including at least one side wall, the at least one side wall being provided with an opening extending from the inside to the outside of the tank body, and the tank body being configured to accommodate a wet processing solution; and a fixing device configured to fix the substrate at the opening of the side wall. The operation method of the wet processing apparatus includes: placing the substrate on an outer side of the side wall and at the position of the opening, and operating the fixing device to fix the substrate; and performing wet processing treatment on the substrate.

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Patent Owner(s)

  • PYXIS CF PTE. LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Baheerathan, Navaneetha Kumaran Singapore, SG 3 1
Sen, Amlan Singapore, SG 15 30

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