Apparatus and methods for enhanced microelectronic device handling
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United States of America
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Feb 27, 2024
Grant Date -
N/A
app pub date -
Jul 15, 2020
filing date -
Jul 15, 2020
priority date (Note) -
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Abstract
An apparatus for handling microelectronic devices comprises a pick arm having a pick surface configured for receiving a microelectronic device thereon, drives for moving the pick arm and reorienting the pick surface in the X, Y and Z planes and about a horizontal rotational axis and a vertical rotational axis, and a sensor device carried by the pick arm and configured to detect at least one of at least one magnitude of force and at least one location of force applied between the pick surface and a structure contacted by the pick surface or a structure and a microelectronic device carried on the pick surface.
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