Micromirrors and off-diagonal hinge structures for micromirror arrays in projection displays
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United States of America Patent
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Mar 15, 2005
Grant Date -
Jul 1, 2004
app pub date -
Feb 12, 2003
filing date -
Jan 29, 2003
priority date (Note) -
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status (Latency Note)
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Abstract
A spatial light modulator is disclosed, along with methods for making such a modulator, that comprises an array of micromirrors each having a hinge and a micromirror plate held via the hinge on a substrate, the micromirror plate being disposed in a plane separate from the hinge and having a diagonal extending across the micromirror plate, the micromirror plate being attached to the hinge such that the micromirror plate can rotate along a rotation axis that is parallel to, but off-set from the diagonal of the micromirror plate. Also disclosed is a projection system that comprises such a spatial light modulator, as well as a light source, condensing optics, wherein light from the light source is focused onto the array of micromirrors, projection optics for projecting light selectively reflected from the array of micromirrors onto a target, and a controller for selectively actuating the micromirrors in the array.
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