Chamber device, extreme ultraviolet light generation apparatus, and electronic device manufacturing method

Number of patents in Portfolio can not be more than 2000

United States of America Patent

PATENT NO 11483917
APP PUB NO 20210289611A1
SERIAL NO

17156376

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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A chamber device may include a concentrating mirror, a central gas supply port, an inner wall, an exhaust port, a recessed portion, and a lateral gas supply port. The recessed portion may be on a side lateral to the focal line and recessed outward from the inner wall when viewed from a direction perpendicular to the focal line. The lateral gas supply port is formed at the recessed portion and may supply gas toward gas supplied from the central gas supply port so that a flow direction of the gas supplied from the central gas supply port is bent from a direction along the focal line toward the exhaust port and an internal space of the recessed portion.

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Patent Owner(s)

  • GIGAPHOTON INC.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Koge, Koichiro Oyama, JP 6 0
Osanai, Takayuki Oyama, JP 5 0
Ueda, Atsushi Oyama, JP 173 2299

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