Processing method of workpiece

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United States of America Patent

PATENT NO 11538704
APP PUB NO 20210090926A1
SERIAL NO

17024153

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ATTORNEY / AGENT: (SPONSORED)

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Abstract

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A processing method of a workpiece in which the workpiece with a plate shape is processed by using a vacuum chamber is provided. In the processing method of a workpiece, a negative pressure is caused to act on a holding surface from a suction path, and suction holding of the workpiece is executed by a chuck table. Then, the gas pressure in the vacuum chamber is reduced to at least 50 Pa and at most 5000 Pa. Then, while the suction holding of the workpiece is executed, an inert gas in a plasma state is supplied to the workpiece, and voltages are applied to electrodes disposed in the chuck table to execute electrostatic adhesion of the workpiece by the chuck table. Then, a processing gas in a plasma state is supplied, and dry etching of the workpiece is executed.

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Patent Owner(s)

  • DISCO CORPORATION

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Takahashi, Hiroyuki Tokyo, JP 157 108
Wada, Kentaro Tokyo, JP 15 43
Watanabe, Yoshio Tokyo, JP 132 2035

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