Method for manufacturing electrostatic chuck having electrode layer including clad member and electrostatic chuck manufactured thereby
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United States of America Patent
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Feb 20, 2024
Grant Date -
Nov 10, 2022
app pub date -
Apr 29, 2022
filing date -
May 10, 2021
priority date (Note) -
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status (Latency Note)
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Abstract
This application relates to a method of manufacturing an electrostatic chuck having a high heat dissipation property and high thermal shock resistance and being lightweight, and an electrostatic chuck manufactured by the method. In one aspect, the method includes preparing a composite powder by milling (i) aluminum or aluminum alloy powder and (ii) carbon-based nanomaterial powder through ball milling. The method may also include manufacturing a multilayer billet including a core layer and one or more shell layers surrounding the core layer, in which at least one of the core and shell layers contains the composite powder. The method may further include extruding the multilayer billet to form an electrode layer and forming a dielectric layer on the electrode layer.
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