Surface inspection apparatus
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United States of America Patent
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Apr 13, 2010
Grant Date -
Mar 5, 2009
app pub date -
Oct 20, 2008
filing date -
May 10, 2006
priority date (Note) -
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status (Latency Note)
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Abstract
A surface inspection apparatus includes units illuminating repetitive patterns formed on a surface of a suspected substance and measuring a variation in an intensity of regular reflection light caused by a change in shapes of the repetitive patterns, units illuminating the repetitive patterns with linearly polarized light, setting an angle formed between a repetitive direction of the repetitive patterns and a direction of a plane of vibration of the linearly polarized light at a tilt angle, and measuring a variation in a polarized state of the regular reflection light caused by the change in the shapes of the repetitive patterns, and a unit detecting a defect of the repetitive patterns based on the variation in the intensity and the variation in the polarized state of the regular reflection light.
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