Near-field optical inspection apparatus
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United States of America Patent
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Jan 14, 2003
Grant Date -
N/A
app pub date -
May 16, 2001
filing date -
Jun 10, 1998
priority date (Note) -
Expired
status (Latency Note)
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Abstract
An apparatus (1) for optical inspection of an article(s) is presented. The apparatus utilizes near-field illumination, and comprises a light source unit (4) generating incident light, a detector unit (14), a fiber bundle for directing (16C) the incident light onto a substantially large surface area (2A) of the article and collecting light (16B) returned from the illuminated surface area, and a control means (28). The control means comprises sensing means consisting of at least three tips for atomic force (AFM) or current tunneling (STM) measurement at sample surface, and is capable of adjusting the position of the fiber bundle relative to the surface of the article.
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