Electrostatic discharge (ESD) array with back end of line (BEOL) connection in a carrier wafer

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United States of America Patent

PATENT NO 11855076
APP PUB NO 20220231010A1
SERIAL NO

17150782

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Abstract

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An electrostatic discharge (ESD) protection apparatus and method for fabricating the same are disclosed herein. In some embodiments, the ESD protection apparatus, comprises: an internal circuit patterned in a device wafer and electrically coupled between a first node and a second node, an array of electrostatic discharge (ESD) circuits patterned in a carrier wafer, where the ESD circuits are electrically coupled between a first node and a second node and configured to protect the internal circuit from transient ESD events, and where the device wafer is bonded to the carrier wafer.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD.

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chen, Kuo-Ji Wu-Ku, TW 87 455
Hung, Tao-Yi Hsin-Chu, TW 5 0
Lee, Jam-Wem Hsinchu, TW 126 1207
Lin, Wun-Jie Hsinchu, TW 78 736

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