Microelectromechanical inertial sensor including a substrate and an electromechanical structure situated on the substrate

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United States of America Patent

PATENT NO 11561238
APP PUB NO 20210302462A1
SERIAL NO

17266498

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Abstract

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A microelectromechanical inertial sensor including a substrate and an electromechanical structure situated on the substrate.

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Patent Owner(s)

  • ROBERT BOSCH GMBH

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Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Boeser, Tobias Stuttgart, DE 1 0
Kiesel, Stefan Reutlingen, DE 3 0

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