Single-sided inflatable vertical slit valve
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United States of America Patent
Stats
-
Sep 9, 2008
Grant Date -
Jan 19, 2006
app pub date -
Jul 13, 2004
filing date -
Jul 13, 2004
priority date (Note) -
In Force
status (Latency Note)
Importance
Abstract
A vacuum chamber having a gate valve including a chamber housing defining an internal vacuum region and first and second openings through the chamber housing and a gate valve secured to the chamber housing. The gate valve includes a sealing door located in the processing region and configured to seal the first opening in the chamber housing; a vertical actuator located outside the chamber housing; a one-sided horizontal actuator located within the processing region and connected to the sealing door; and a valve shaft extending through the second opening in the chamber housing and connecting the vertical actuator to the one-sided horizontal actuator.
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