Automated transfer and drying tool for process chamber

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United States of America Patent

PATENT NO 11699619
APP PUB NO 20210242085A1
SERIAL NO

17236276

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ATTORNEY / AGENT: (SPONSORED)

Importance

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Abstract

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Some embodiments relate to a processing tool for processing a singulated semiconductor die. The tool includes an evaluation unit, a drying unit, and a die wipe station. The evaluation unit is configured to subject the singulated semiconductor die to a liquid to detect flaws in the singulated semiconductor die. The drying unit is configured to dry the liquid from a frontside of the singulated semiconductor die. The die wipe station includes an absorptive drying structure configured to absorb the liquid from a backside of the singulated semiconductor die after the drying unit has dried the liquid from the frontside of the singulated semiconductor die.

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Patent Owner(s)

  • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.

International Classification(s)

Inventor(s)

Inventor Name Address # of filed Patents Total Citations
Chu, Yang-Ann Hsinchu, TW 61 177
Kuo, Shou-Wen Hsinchu, TW 43 56
Kuo, Tsung-Sheng New Taipei, TW 40 209
Liu, Hsu-Shui Pingjhen, TW 78 659
Pai, Jiun-Rong Jhubei, TW 117 702

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