Methods and systems for controllably moving one or more moveable stages in a displacement device
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United States of America Patent
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Sep 1, 2020
Grant Date -
Jul 19, 2018
app pub date -
Dec 22, 2017
filing date -
Jul 6, 2015
priority date (Note) -
In Force
status (Latency Note)
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Abstract
Aspects of the invention provide methods and systems for moving moveable stages relative to a stator. A stator is operationally divided into multiple stator tiles. The movement of the one or more moveable stages is controlled by a plurality of controllers (each assigned particular control responsibilities). A controller is provided for each stator sector, where each stator sector comprises a group of one or more stator tiles. Controllers from neighboring sectors share various information to facilitate controllable movement of one or more moveable stages relative to the stator.
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