Large area optical quality synthetic polycrystalline diamond window
Japan Patent
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Abstract
多結晶化学気相成長(CVD)ダイヤモンドウェーハであって、70mm以上の最も長い直線寸法と、1.3mm以上の厚さと、少なくとも多結晶CVDダイヤモンドウェーハの中央領域について室温(公称298K)で測定された以下の特徴のうちの一方又は両方とを有し、中央領域は、円形であり、多結晶CVDダイヤモンドウェーハの中央箇所上に心出しされ且つ多結晶CVDダイヤモンドウェーハの最も長い直線寸法の直径を有し、かかる特徴は、10.6μmで0.2cm-1の吸収係数及び145GHzで2?10-4以上の誘電損係数tanδであることを特徴とする多結晶CVDダイヤモンドウェーハ。【選択図】図1

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- 15 United States
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エレメント シックス テクノロジーズ リミテッド | Not Provided |
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Inventor(s)
Inventor Name | Address |
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ドッドソン ジョセフ マイケル | - |
ブランドン ジョン ロバート | - |
モラート ティモシー ピーター | - |
イングリス ポール ニコラス | - |
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