A SUPERCONTINUUM RADIATION SOURCE AND ASSOCIATED METROLOGY DEVICES
Japan Patent
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Abstract
ポンプ放射を生成し、かつ複数のポンプレーザヘッドを備えるポンプレーザ構成と、各ポンプレーザヘッドからのそれぞれのポンプ放射を結合するための放射コンバイナと、非線形ファイバであって、スーパーコンティニウム放射を生成するために非線形ファイバ内に作動媒体を励起するようにポンプ放射を受けるための非線形ファイバとを備えるスーパーコンティニウム放射源が開示される。各5個のポンプレーザヘッドは、任意の方向に5cm以下の寸法を有する。代替的に又はそれに加えて、スーパーコンティニウム放射源は、ポンプレーザ構成を制御するための制御構成をさらに含み、制御構成は、各ポンプレーザヘッドからのパルスの非同時放出のために構成される。【選択図】図7(a)

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Patent Owner(s)
Patent Owner | Address |
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エーエスエムエル ネザーランズ ビー.ブイ. | Not Provided |
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Inventor Name | Address |
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ニー,ヨンフェン | - |
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