NOVEL RUTHENIUM COMPOUND, PREPARATION METHOD THEREFOR, PRECURSOR COMPOSITION FOR FILM DEPOSITION CONTAINING SAME, AND METHOD FOR DEPOSITING FILM BY USING SAME

Japan Patent

PATENT NO 6284682
APP PUB NO JP-2017524729-A
SERIAL NO

2017515645

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キム　ソ　ヨン 大韓民国　３０５−３４５　デジョン　ユスン−ク　シンスン−ドン　１５２　デリム　ヅル　アパートメント　１０１−５０１
ハン ウォン ソク -
コ ウォンヨン -

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