APPARATUS FOR PROCESSING SUBSTRATE

Korea, Republic of Patent

PATENT NO 101392378
SERIAL NO

20130032995

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Abstract

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According to an embodiment of the present invention, an apparatus for processing a substrate includes a process chamber which has an inner space for receiving a substrate transferred from the outside and performs a process for the substrate; and a tube-type heater which is installed along the sidewall of the process chamber, is arranged around the inner space, and has a fluid path through which a cooling medium supplied from the outside flows.

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Patent Owner(s)

Patent OwnerAddress
EUGENE TECHNOLOGY CO LTDKR42 CHUGYE-RO YANGJI-MYEON CHEOIN-GU YONGIN-SI GYEONGGI-DO 17156

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Inventor(s)

Inventor Name Address
KIM YONG KI BUSAN
SHIN YANG SIK YONGIN-SI
SONG BYOUNG GYU YONGIN-SI GYEONGGI-DO 17129
KIM KYONG HUN SEOUL
YANG IL KWANG GYEONGGI-DO

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