System for processing substrate

Korea, Republic of Patent

PATENT NO 101930456
SERIAL NO

20180051460

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Abstract

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The present invention relates to a system for processing a substrate and, more specifically, relates to a system for processing a substrate having a plurality of process tubes. According to an embodiment of the present invention, the system for processing a substrate comprises: first and second process tubes arranged to be spaced in a first axial direction, and providing an independent space with each other; a substrate boat in which a plurality of substrates are stacked, wherein the substrate boat is provided to each process space of the first and second process tubes; and first and second boat elevator provided to the first and second process tubes and elevating the substrate boat. Moreover, the first and second boat elevators can comprise an elevating member disposed in a space between the first and second process tubes.

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Patent Owner(s)

Patent OwnerAddress
EUGENE TECHNOLOGY CO LTDKR42 CHUGYE-RO YANGJI-MYEON CHEOIN-GU YONGIN-SI GYEONGGI-DO 17156

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Inventor(s)

Inventor Name Address
KANG SUNG HO -
OH SANG YOUNG -
KIM CHANG DOL -
CHOI GYU HO -

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