METHOD FOR MANUFACTURING A VIBRATOR, VIBRATOR, AND OSCILLATOR

Korea, Republic of Patent

APP PUB NO KR-20140118751-A
SERIAL NO

20140028110

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Abstract

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A method for manufacturing a vibrator, according to the present invention, includes: forming a coating layer that covers a silicon substrate; patterning the coating layer; forming a semiconductor layer that covers the silicon substrate and the coating layer; forming a vibrating portion having a beam shape on the coating layer and a support portion that supports the vibrating portion by patterning the semiconductor layer; forming an opening that exposes the silicon substrate; forming a recess portion by removing the silicon substrate through the opening; and removing the coating layer. In the step of forming the vibrating portion and the support portion, the support portion having a first portion that is located on the silicon substrate and a second portion that is located on the coating layer to connect the first portion and the vibrating portion is formed.

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Patent Owner(s)

Patent OwnerAddress
SEIKO EPSON CORPJPTOKYO JAPAN TOKYO METROPOLIS

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Inventor(s)

Inventor Name Address
YOSHIZAWA TAKAHIKO YOKOHAMA

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